Factory tour at ZEISS in Oberkochen - 15th symposium “Technical cleanliness in assembly and production processes”
Factory tour and lecture by Dr. Martin Nalbach (ZEISS)
Find out in the presentation by Dr. Martin Nalbach (ZEISS) why absolute cleanliness is a decisive factor in the production of the world's most precise EUV lithography optics (in German language only).
The requirements for cleanliness in semiconductor manufacturing are extremely high - even the smallest impurities can impair the performance of high-end optics. ZEISS Semiconductor Manufacturing Technology (SMT) therefore relies on highly developed cleanliness standards and innovative technical solutions to ensure the quality and precision of these essential components.
Key points of the factory tour with presentation:
- Insight into ZEISS Semiconductor Manufacturing Technology - How are the world's most precise mirrors made?
- Cleanliness requirements - What standards apply in lithography optics production?
- Technical solutions - Which innovative methods does ZEISS use for maximum cleanliness?
15th symposium “Technical cleanliness in assembly and production processes”
(in German language only)
Wednesday, May 14, 2025
15:15 - 17:00: Factory tour ZEISS, Oberkochen
Thursday, May 15, 2025
9:00 - 16:00: Symposium and workshops
Introductory seminar (optional)
(in German language only)
Tuesday, May 13, 2025, Schlosshotel Hellenstein (next to Congress Heidenheim)
18:00 - 19:30: Introduction to the basics of technical cleanliness according to VDA 19 Part 1 and 2
Moderation: Volker Burger, Managing Director, CleanControlling
- The most important aspects of measurement technology according to VDA19 Part 1
- Assembly and production cleanliness according to VDA19 Part 2
This basic workshop serves as preparation for the subsequent symposium and its presentations and is intended to make it easier for participants who are new to the topic of technical cleanliness to get started.